Refurbished Tegal 903e  

Refurbished Tegal 903e systems provided by Legacy Semiconductor are diode plasma etchers with a fixed electrode gap. The system is designed around the production-proven 90X transport system that can accommodate 3" to 6" round silicon and GaAs wafers and also square substrates. Typical applications for the semiconductor industry include the etching of Oxides, Nitrides & Polyimides with process steps of LDD Spacer, Pad, Contacts, Vias, etc.

Refurbished Tegal 903 systems are outfitted with the latest upgrades, including;

Legacy's External Rotary Flow Switch Upgrade

3/8" Pressure Manifold W/ATM Sensor & Unit 8130 Pressure Controller

Upgraded Front Panel W/IFPD, RF Hour Meters & Extended Gas/Pressure Manifold Controls

DACSCAN (Micro-P Board) of Issue 7 or Later W/Late Version Softawre

Super Spatula & Super Tine Wafer Transport System

BN Gas Manifold W/Unit 8100 MFC's