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Tegal 901e & 903e Flow Switch Upgrade  

♦ Eliminates Failure Due To Particle Build-Up

♦ Visual Verification of Flow

♦ Adjustable Trip Setting

   Tegal 901e & 903e Series Etchers have been delivered with magnetic reed type flow switches since their introduction. These switches have a tendency to accumulate particles and get stuck in the open or closed position. The risk of this is having the system alarm/fault unnecessarily or worse, in the event coolant is not flowing the system does not alarm or fault.

   The engineers at Legacy Semiconductor have developed a field conversion kit that incorporates a paddle type flow switch. Fluid flowing through the switch spins a magnetic rotor to induce voltage in a coil. This voltage is measured by a simple electronic circuit, which compares it to a user-set trip voltage. When the voltage is above the set point, a relay is held in its active position. If the voltage falls below the set point, or should the fluid stop flowing, the relay is switched off and triggers the system to alarm and or fault.

   An active design combats the problem of particle buildup, which can jam the OEM flow switches. Because the rotor is constantly spinning, it cleans itself of most buildup. In the very unlikely event that an object in the flow line did interfere with the rotor, the rotor will stop turning, and the switch will activate causing the system to alarm or fault.  

   A clear polysulfone faceplate displays the rotor to tell you at a glance if coolant is flowing. The speed of the rotor shows you the approximate rate of flow. 

   The trip point is set by adjusting an accessible POT through a hole on the rear of the electronics housing. The potentiometer can be adjusted without opening the electronics unit, and is in a recessed position so that it cannot be turned accidentally.

   The faceplate may easily be removed to clean the flow chamber and rotor if necessary. No other maintenance is normally needed.

Available Configurations  

Tegal 900, 901, 901e Table Top Models

P/N: LSL-10-1002 

Tegal 903, 903e Table Top Models

P/N: LSL-10-1003 

Tegal 901e & 903e Through-The-Wall Models

P/N: LSL-10-1004 (900, 901, 901e)

P/N: LSL-10-1005 (903 & 903e) 

Call 503-644-3222 or Email: sales@legacysemi.com

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