Tegal® 9XX Module Rebuilds
| Products | |
| Tegal® 9XX Series Etchers | |
| Refurbished Systems | |
| Spares | |
| 901 | |
| 903 | |
| 915/965 | |
| PM Kits | |
| Upgrades | |
| Conversion Kits | |
| Tooling | |
| Technical Data | |
| Services | |
| Tegal® 9XX Series Etchers | |
| Repairs | |
| RF Match | |
| PC Boards | |
| Module Rebuilds | |
| Field Service | |
| Training | |
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Complete Tegal® 9XX Module Rebuilds
→Carriage
→Sender/Receiver
→Chuck Assembly
→Chamber
→Gas Delivery
→Pressure/Vacuum
Legacy Semiconductor provides complete Tegal® 9XX Module Refurbishment. This includes plating finishes on all machined & sheet metal parts. If the protective finishes such as; Anodize®, Alodine® and Zinc plating has failed these parts will be stripped & re-plated. All new consumable parts are used during re-assembly and each module is machine tested prior to shipping.
Legacy Semiconductor also maintains crates specifically designed for each module for protection during transit.
Module Refurbishments are very affordable, and in many cases a complete refurbishment will cost less than continual repairs when parts, man hours and machine downtime are factored in.
Call 503-644-3222 or Email: sales@legacysemi.com
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