Tegal® 9XX PM/Repair Kits
| Products | |
| Tegal® 9XX Series Etchers | |
| Refurbished Systems | |
| Spares | |
| 901 | |
| 903 | |
| 915/965 | |
| PM Kits | |
| Upgrades | |
| Conversion Kits | |
| Tooling | |
| Technical Data | |
| Services | |
| Tegal® 9XX Series Etchers | |
| Repairs | |
| RF Match | |
| PC Boards | |
| Module Rebuilds | |
| Field Service | |
| Training | |
|
|
SENDER / RECEIVER PM Kit (Super Spat)
Kit Includes
4 Ea. 80-200-144, BSHG BALL
2 Ea. 80-202-343, BSHG BALL
4 Ea. 80-200-127, BEARING FLANGED DBL SHLD
2 Ea. 80-200-121, BEARING FLANGED DBL SHLD
1 Ea. 55-005-001, BELT DRIVE LOADER
1 Ea. 55-008-001, BELT LOADER (SUPER SPAT)
1 Ea. 31-173-001, SOLENOID VALVE, SDR/RCVR
1 Ea. 80-080-052, CYLINDER DBL PANCAKE
1 Ea. 80-202-297, BELT TIMING (SSPAT)
P/N: LSL-0054
SHUTTLE PM Kit
Kit Includes
6 Ea. 80-200-144, BSHG BALL
2 Ea. 80-200-121, BEARING FLANGED DBL SHLD
4 Ea. 80-202-034, GROMMET
4 Ea. 80-202-046, GROMMET, 5/16ID, 7/16DIA HOLE
1 Ea. 55-004-001, BELT DRIVE CARRIAGE
1 Ea. 31-193-004, SOLENOID VALVE ASSEMBLY
2 Ea. 83-084-001, SPRING, GROUND, SHUTTLE
P/N: LSL-0054 - 901e & 903e
LOWER ELECTRODES SOLD SEPARATELY
LOWER ELECTRODE (901e & 903e) PM Kit
Kit Includes
1 Ea. 80-080-072, CYLINDER DBL ENDED (PINS)
1 Ea. 80-080-077, CYLINDER AIR (CHUCK)
1 Ea. 80-200-314, CAM FOLLOWER
1 Ea. 31-388-001, RF CONNECTOR ASSY
4 Ea. 80-163-001, WASHER LKG EXT-T #4 SST
4 Ea. 80-127-101, SCREW 4-40 X 1/4L SST
1 Ea. 80-202-191, O-RING VITON
1 Ea. 80-202-192, O-RING VITON
1 Ea. 80-202-357, O-RING SILC GRY
3 Ea. 40-297-XXX, PIN QUARTZ or PIN CERAMIC (901E or 903e)
3 Ea. 39-732-001, COLLAR PIN
3 Ea. 80-200-342, BAND CONT FEM .125 PIN
1 Ea. 80-080-065, CYL DBL STUD (903e Only)
P/N: LSL-0056 - 901e
P/N: LSL-0057 - 903e
UPPER ELECTRODES SOLD SEPARATELY
CUSTOM KITS ARE ALSO AVAILABLE
Please contact your sales representative for more information
9XX CHAMBER PM KIT w/Solid Ground Ring
901e Kit Includes
903e (Non-Direct Cooled) Kit
Includes
1 Ea. 80-202-187, O-RING SILC GRAY
3 Ea. 80-202-190, O-RING VITON
1 Ea. 80-202-189, O-RING VITON
2 Ea. 80-202-154, O-RING VITON
2 Ea. 80-202-212, O-RING VITON
1 Ea. 41-399-001, GASKET RF
1 Ea. 40-159-001, ROD SAPPHIRE
903e (Direct Cooled) Kit Includes 5 Ea.
80-202-465, O-RING CHEMRAZ 1 Ea.
37-222-002, COOLING PLATE 1 Ea.
38-023-001, TUBE COOLING 2 Ea.
80-202-212, O-RING VITON 1 Ea.
41-399-001, GASKET RF 1 Ea.
40-159-001, ROD SAPPHIRE
P/N: LSL-0058 - 901e
1 Ea. 80-202-187, O-RING SILC GRAY
3 Ea. 80-202-190, O-RING VITON
1 Ea. 80-202-189, O-RING VITON
2 Ea. 80-202-154, O-RING VITON
2 Ea. 80-202-212, O-RING VITON
1 Ea. 41-399-001, GASKET RF
1 Ea. 40-159-001, ROD SAPPHIRE
P/N: LSL-0059 - 903e (D.C.)
P/N: LSL-0060 - 903e (N.D.C)
9XX VACUUM VALVE REBUILD KIT
Kit Includes
1 Ea. BELLOWS & SEAL
2 Ea. SEAL O-RING VITON
1 Ea. VALVE SEAT O-RING VITON
2 Ea. ASSEMBLY GREASE
P/N: 81-007-077 - 901, 903 & 915
9XX GAS/PRESSURE BN VALVE REBUILD KIT
Kit Includes
1 Ea. BELLOWS/STEM/STEM
TIP/ADAPTER
2 Ea. O-RING, VITON
1 Ea. WASHER
1 Ea. WAVE WASHER
1 Ea. CLIP
P/N: 81-007-129 - 901, 903 & 915
Call 503-644-3222 or Email: sales@legacysemi.com
For More Information
| ©2015 Legacy Semiconductor | Privacy Policy |