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Tegal® 9XX Conversion Kits  

Products                                     
Tegal® 9XX Series Etchers
Refurbished Systems
Spares
   901
   903
   915/965
PM Kits
Upgrades
Conversion Kits
Tooling
Technical Data
Services
Tegal® 9XX Series Etchers
Repairs
   RF Match
   PC Boards
Module Rebuilds
Field Service 
Training
 

 

Size Conversion Kits

900/901/901e

3" (75mm) Size Conversion Kit 4" (100mm) Size Conversion Kit
5" (125mm) Size Conversion Kit 6" (150mm) Size Conversion Kit

903/903e

3" (100mm) Size Conversion Kit 4" (100mm) Size Conversion Kit
5" (100mm) Size Conversion Kit 6" (100mm) Size Conversion Kit
System Conversion Kits
901 903 903 901

 

Contact your Sales Representative or email: sales@legacysemi.com  for configuration options, pricing and part numbers on all our conversion kits.

 

 

 

 

Call 503-644-3222 or Email: sales@legacysemi.com

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