Tegal 903e Configurations & Options 

Tegal 903e Table Top

The classic original 903e table top version offers a small foot print only 42in X 40in (1067mm X 1016mm) 

Tegal 903e Through-The-Wall

The bulkhead style 903e version utilizes little clean room space and a small foot print in the service aisle - 73in X 50in (1854mm X 1270mm)

Tegal 903e Non-Direct Cooled Chamber

The original standard 903 chamber where cooling is provided via a cooling ring. Typically assembled with Viton® o-rings & a non-anodized upper electrode

Tegal 903e Direct Cooled Chamber

The latest design that provides uniform temperature control across the upper electrode via a backside mounted cooling plate. Assembled with Chemraz® o-rings and a variety of upper electrodes, including the new high performance model