Refurbished Tegal 915e  

Refurbished Tegal 915 systems provided by Legacy Semiconductor offer the industries largest capacity plasma barrel etcher. With the capacity of six cassettes of 100 mm wafers and four cassettes of 125 mm and 150 mm wafers Through-put is greatly increased. The system has two independent gas inputs and chamber temperature control of up to 100 degrees Celsius. Semiconductor applications typically include Photoresist Strip and Descum.

The systems are outfitted with the latest upgrades, including;

BK Valve Gas Manifold

BK Pressure Manifold

ENI ACG RF Generator Interface