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Tegal 915e Configurations & Options
| Products |
| Tegal 9XX Series Etchers |
| Refurbished Systems |
| Spares |
| 901e Parts |
| 903e Parts |
| 915e Parts |
| PM Kits |
| Upgrades |
| Conversion Kits |
| Tooling |
| Technical Data |
| Services |
| Tegal 9XX Series Etchers |
| Repairs |
| RF Match |
| PC Boards |
| Module Rebuilds |
| Field Service |
| Tegal Training |
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Tegal 915e Table TopThe classic original Tegal 915e table top version offers a small foot print only 25in X 36in (635mm X 914mm). |
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Tegal 915e Wafer Sizes
3" (75mm) - 4" (100mm) - 5" (125mm) - 6" (150mm)
Air Actuated Door
All New Wiring Harness
Integrated Flat Panel Display w/Touch screen
Call 503-644-3222 or Email: sales@legacysemi.com
For More Information
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