Refurbished Tegal 901e  

Refurbished Tegal 901 systems provided by Legacy Semiconductor are diode plasma etchers with a fixed electrode gap. The system is designed around the production-proven 90X transport system that can accommodate 3" to 6" round silicon and GaAs wafers and also square substrates. Typical applications for the semiconductor industry include the etching of Nitrides, Oxides, Poly's & GaAs with process steps of  Pad, Backside, Zero Layer, Planarization & Descum. In general, the Tegal 901e is best suited for technology design rules down to 0.5 micron.

Refurbished Tegal 901e systems are outfitted with the latest upgrades, including;

3/8" Pressure Manifold W/ATM Sensor & Unit 8130 Pressure Controller

Upgraded Front Panel W/RF Hour Meters & Extended Gas/Pressure Manifold Controls

Legacy's External Rotary Flow Switch Upgrade

BN Gas Manifold W/Unit 8100 MFC's

Super Spatula & Super Tine Wafer Transport System

DACSCAN (Micro-P Board) of Issue 7 or Later W/Late Version Software