 |
Tegal 901e Configurations & Options
| Products | |
| Tegal 9XX Series Etchers | |
| Refurbished Systems | |
| Spares | |
| 901e Parts | |
| 903e Parts | |
| 915e Parts | |
| PM Kits | |
| Upgrades | |
| Conversion Kits | |
| Tooling | |
| Technical Data | |
| Services | |
| Tegal 9XX Series Etchers | |
| Repairs | |
| RF Match | |
| PC Boards | |
| Module Rebuilds | |
| Field Service | |
| Tegal Training | |
|
|
|
|
|
Tegal 901e Table TopThe classic original 901e table top version offers a small foot print only 42in X 40in (1067mm X 1016mm) |
Tegal 901e Through-The-WallThe bulkhead style 901e version utilizes little clean room space and a small foot print in the service aisle - 73in X 50in (1854mm X 1270mm) |
 |
 |
Tegal 901e Wafer Sizes
3" (75mm) - 4" (100mm) - 5" (125mm) - 6" (150mm)
External Flow Switch
All New Wiring Harness
Integrated Flat Panel Display w/Touch screen
Upgraded Front Panel
Call 503-644-3222 or Email: sales@legacysemi.com
For More Information
| ©2015 Legacy Semiconductor | Privacy Policy |