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Tegal 9XX Module Controller  

Run Your Tegal Modules On The Bench With Legacy Semiconductor's New 9XX Module Controller

   All refurbished systems provided by Legacy Semiconductor must undergo a minimum of 1000 wafer transfers without fault and with minimal rotation following wafer the hand-off set-up during the final test phase. One of the primary tools used to accomplish this is the bench top 9XX Module Controller that allows our Assembly Technicians and Engineers to precisely align, set speeds, and test for extended periods the wafer transport modules prior to installing them in the system.

   The controller operates all Tegal® 9XX transport modules, including; 900e, 901e, 903e and 980 series systems with a standard DACSCAN and System Software which are not included but it provides a perfect use for your spare set.      

All the Necessary cables are included to power and operate the Sender/Receiver and Carriage Modules. The power harness can provide power to any of the Tegal 9XX modules further enhancing bench top troubleshooting and/or set-up of all the modules.

   External test points allow for monitoring voltages supplied to the DACSCAN and modules. Adjustments are easily made via an access panel in the rear with a silkscreened diagram of the POT locations.

   Wafer Transport diagnostic tests are selected through switch pack two just as if the modules were in the system. All transport diagnostic tests can be performed, including;

Sender/Receiver Tests

· Elevator Movement

· Spatula Movement

· Staging Platform Movement

· Complete Cycle Diagnostic

Carriage Tests

· Shuttle Movement

· Cup Movement

· Wafer Pins Movement

· Wafer Pins & Cup Movement

· Shuttle, Cup & Pins Movement

   AN RS232 connection is available at the rear of the unit  to connect a CRT which can be used to display faults that may occur during the set-up, testing or troubleshooting of modules. These faults are the same that are generated during normal system operation.

   The unit will operate around the world with the appropriate power cord. The ordering part number will be determined based on the delivery location of the unit.

Order Online

Call 503-644-3222 or Email: sales@legacysemi.com

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